Vsli Electronics Microstructure Science: Lithography For Vlsi (v L S I Electronics)
Author(s)
Norman G. Einspruch
Norman G. Einspruch
Name in long format: | Vsli Electronics Microstructure Science: Lithography For Vlsi (v L S I Electronics) |
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ISBN-10: | 0122341163 |
ISBN-13: | 9780122341168 |
Book pages: | 361 |
Binding: | Hardcover |
Publisher: | Academic Pr |