VLSI technology (McGraw-Hill series in electrical engineering)
Author(s)
Sze, S.M.
Sze, S.M.
P.1. Crystal Growth And Water Preparation -- P.2. Epitaxy -- P.3. Dielectric And Polysilicon Film Deposition -- P.4. Oxidation -- P.5. Diffusion -- P.6. Ion Implantation -- P.7. Lithography -- P.8. Dry Etching -- P.9. Metallization -- P.10. Process Simulation -- P.11. Vlsi Process Integration -- P.12. Diagnostic Techniques -- P.13. Assembly Techniques And Packaging -- P.14. Yield And Reliability. Edited By S.m. Sze. Includes Bibliographical References And Index.
Keywords
Integrated circuits--Very large scale integration, TK7874 .V566 1983
Integrated circuits--Very large scale integration, TK7874 .V566 1983
| Name in long format: | VLSI technology (McGraw-Hill series in electrical engineering) |
|---|---|
| ISBN-10: | 0070626863 |
| ISBN-13: | 9780070626867 |
| Book pages: | 654 |
| Book language: | en |
| Edition: | nullth |
| Binding: | Hardcover |
| Publisher: | McGraw-Hill |
| Dimensions: | xiv, 654 p. : ill. ; 24 cm. |
