The Science and Engineering of Microelectronic Fabrication

An Introduction To Microelectronic Fabrication -- Semiconductor Substrates -- Diffusion -- Thermal Oxidation -- Ion Implantation -- Rapid Thermal Processing -- Optical Lithography -- Photoresists -- Nonoptical Lithographic Techniques -- Vacuum Science And Plasmas -- Etching -- Physical Deposition: Evaporation And Sputtering -- Chemical Vapor Deposition -- Epitaxial Growth -- Device Isolation, Contacts, And Metallization -- Cmos Technologies -- Gaas Technologies -- Silicon Bipolar Technologies -- Mems -- Integrated Circuit Manufacturing -- Appendix 1. Acronyms And Common Symbols -- Appendix 2. Properties Of Selected Semiconductor Materials -- Appendix 3. Physical Constants -- Appendix 4. Conversion Factors -- Appendix 5. Some Properties Of The Error Function -- Appendix 6. F Values -- Appendix 7. Suprem Commands. Stephen A. Campbell. Includes Bibliographical References And Index.