The Piezojunction Effect in Silicon Integrated Circuits and Sensors
Author(s)
Fabiano Fruett
Gerard C.M. Meijer
Fabiano Fruett
Gerard C.M. Meijer
This book describes techniques that can reduce mechanical-stress-induced inaccuracy and long-term instability in chips. The authors also show that the piezojunction effect can be applied for new types of mechanical-sensor structures. Thermo-mechanical stress is induced when packaged chips cool down to the temperature of application.
| ISBN-10: | 030648210X |
|---|---|
| ISBN-13: | 9780306482106 |
| Book pages: | 408 |
| Book language: | English |
| Edition: | 1 |
| Binding: | eBook |
| Publisher: | Springer Nature |
| Dimensions: | Page Fidelity |
