Silicon Nitride For Microelectronic Applications, Part 1 - Preparation And Properties (handbook Of Electronic Materials, V. 3,)
Author(s)
John T. Milek
John T. Milek
Pt. 1. Preparation And Properties.--pt. 2. Applications And Devices. [by] John T. Milek. Includes Bibliographies.
Keywords
Microelectronics--Materials, Silicon nitride, TK7871.15.S558 M55 1971, 621.381/7
Microelectronics--Materials, Silicon nitride, TK7871.15.S558 M55 1971, 621.381/7
| Name in long format: | Silicon Nitride For Microelectronic Applications, Part 1 - Preparation And Properties (handbook Of Electronic Materials, V. 3,) |
|---|---|
| ISBN-10: | 0306671034 |
| ISBN-13: | 9780306671036 |
| Book pages: | 118 |
| Book language: | en |
| Edition: | 1 |
| Binding: | Hardcover |
| Publisher: | Springer |
| Dimensions: | 2 v. illus. 28 cm. |
