Ion Implantation in Microelectronics: A Comprehensive Bibliography
Author(s)
A. H. Agajanian
A. H. Agajanian
Keywords
Electronics - Microelectronics, Ions & Ionization in Chemistry, Electronics - Semiconductors, Solid State Physics - General & Miscellaneous
Electronics - Microelectronics, Ions & Ionization in Chemistry, Electronics - Semiconductors, Solid State Physics - General & Miscellaneous
| Name in long format: | ion_implantation_in_microelectronics-a_comprehensive_bibliography |
|---|---|
| ISBN-10: | 030665198X |
| ISBN-13: | 9780306651984 |
| Book pages: | 266 |
| Edition: | 1 |
| Binding: | Hardcover |
| Publisher: | Kluwer Academic / Plenum Publishers |
