High Resolution Focused Ion Beams: FIB and its Applications: The Physics of Liquid Metal Ion Sources and Ion Optics and Their Application to Focused Ion Beam Technology

The book is subtitled The physics of liquid metal ion sources and ion optics and their application to focused ion beam technology. The authors identify field ionization sources, explain the physics behind the liquid metal ion source (LMIS), and review charged particle optics for applying the LMIS in a focused ion beam system. Later chapters discuss the interactions of ions with solids, and overview practical procedures for designing deflection systems and mass filters, aligning the beam, and evaluating column performance. Orloff and Utlaut are professors at the University of Maryland and University of Portland, respectively, while Swanson is chairman of the FEI Company in Oregon. Annotation (c)2003 Book News, Inc., Portland, OR