Fabrication Engineering at the Micro- and Nanoscale
Author(s)
Stephen A. Campbell
Stephen A. Campbell
Designed for advanced undergraduate or first-year graduate courses in semiconductor or microelectronic fabrication, Fabrication Engineering at the Micro- and Nanoscale, Fourth Edition, covers the entire basic unit processes used to fabricate integrated circuits and other devices.With many worked examples and detailed illustrations, this engaging introduction provides the tools needed to understand the frontiers of fabrication processes.
Keywords
Electrical, Microelectronics, Engineering (General), Professional, Career & Trade -> Engineering -> Electrical & Electronics Engineering, Professional, Career & Trade -> Electronics -> General, Professional, Career & Trade -> Engineering -> General Engineering, 04B044, 04, 04B044EBK
Electrical, Microelectronics, Engineering (General), Professional, Career & Trade -> Engineering -> Electrical & Electronics Engineering, Professional, Career & Trade -> Electronics -> General, Professional, Career & Trade -> Engineering -> General Engineering, 04B044, 04, 04B044EBK
| ISBN-10: | 0197547885 |
|---|---|
| ISBN-13: | 9780197547885 |
| Book pages: | 408 |
| Book language: | English |
| Edition: | 4 |
| Binding: | eBook |
| Publisher: | Oxford University Press Academic US |
| Dimensions: | Page Fidelity |
